BALD Engineering News Blog

BALD Engineering News Blog

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Probably The Best ALD news blog. Covering new and old developments in Atomic Layer Deposition and Technology. From BALD Engineering:

jonas.sundqvist@baldengineering.com

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The SEMATECH ALD equipment forum will run from February 17th-20th in San Diego

WorkshopsPosted by Jonas 2014-01-31 15:08:34
The SEMATECH ALD equipment forum will run from February 17th-20th in San Diego and will focus on the following topics:

- Equipment Cost of Ownership
- Defect Reduction
- Precursor Qualification
- Maintenance Best Practice
- Process Control / FDC





This forum is being supported by HKE, TEL and others; with high volume manufacturing Fab engineers participating from: Intel, IBM, Samsung, UMC, Winbond, Macronix, GlobalFoundries, TSMC, Renesas, Freescale and HP. We are focusing on both oxides and metal nitrides.

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