BALD Engineering News Blog

BALD Engineering News Blog

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Probably The Best ALD news blog. Covering new and old developments in Atomic Layer Deposition and Technology. From BALD Engineering:

jonas.sundqvist@baldengineering.com

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A new review paper on ALD on particles

ALD EquipmentPosted by Jonas 2014-01-11 23:36:14
Here is a new review paper on ALD on particles with special focus on the reactor designs - very interesting topic.

Reactor concepts for atomic layer deposition on agitated particles: A review

Delphine Longrie, Davy Deduytsche and Christophe Detavernier
J. Vac. Sci. Technol. A 32, 010802 (2014)
LINK

The article covers, agitation or fluidization of the particles is necessary for performing ALD on (nano)particles. The principles of gas fluidization of particles will be outlined, and a classification of the gas fluidization behavior of particles based on their size and density will be given. Following different reactor concepts that have been designed to conformally coat (nano)particles with ALD will be described, and a concise overview will be presented of the work that has been performed with each of them ending with a concept reactor for performing spatial ALD on fluidized particles.

I. INTRODUCTION
II. ALD ON STATIC PARTICLES
A. Particles supported in a grid
B. Particles contained in a crucible
1. Calculations for particles contained in a crucible
III. GAS FLUIDIZATION OF PARTICLES
A. Fundamentals
B. Classification of fluidized particles
IV. ALD ON FLUIDIZED PARTICLES
V. ALD ON AGITATED PARTICLES
A. Rotary reactor for thermal ALD on particles
B. Rotary reactor for plasma-enhanced ALD on particles
VI. SPATIAL ALD ON PARTICLES
VII. CONCLUSIONS



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