FinFET evolution for the 7nm and 5nm CMOS technology nodes
From AARON THEAN, Director of the Logic Device Program at imec, Leuven, Belgium.
"The learning curve to master these materials (for FinFETs) is steep. For example, introducing Ge into a fin is not a trivial process when it agglomerates easily with higher process temperatures. On the device side, leakages due to narrow band gap, gate-stack passivation, and defectivitiy are on-going hurdles. Moreover, any technique employed to integrate Ge in the pFET must be CMOS compatible, which means that it must allow a co-integration with materials for nFETS, like Si, III-V materials. For all these challenging options, it is our goal to identify, for our technology partners, the promising options, innovate on the solutions, and work-out the design/system impact"
Cross-sectional TEM images Left: SiGe on Si Fins, Middle: strained Ge/SiGe on Si, Right: InGaAs/InP on Si Fins.